Ellipsometer

An ellipsometer is an optical measurement instrument used to probe film thickness, optical constants, and the microstructure of materials. Due to its high measurement accuracy, it is suitable for ultra-thin films. No contact with the sample, no damage to the sample and no vacuum make it an attractive measuring instrument.

Sample Requirements

The sample needs a mirror surface.
The sample is a thin film.
The multilayer film needs to have a backing plate.
Length and width are 20 mm, the overall thickness of the sample is > 1 mm.
If there are special circumstances, please communicate in advance.

Application

Determine thickness and refractive index of dielectric, semiconductor, and metallic films, etc.
Analyze surface, interface properties, roughness of thin film materials

Instrument and Result Display

FAQ

Q1. How to choose the spectral range of the ellipsometer test?

A. The spectral range of the ellipsometer is optional from deep ultraviolet 142 nm to infrared 33 μm. The choice of spectral range depends on factors such as the properties of the material to be measured, the thickness of the film, and the spectral segment of interest. For example, the doping concentration has a great influence on the infrared optical properties of materials, so an ellipsometer capable of measuring infrared wavelengths is required. Thin film thickness measurement requires light to penetrate the film and reach the substrate, so it is necessary to select a transparent or partially transparent spectral segment of the material. For thick films, long wavelengths are more beneficial for measurement.

Q2. Which materials are suitable for ellipsometer testing?

A. It is suitable for inorganic materials, and the sample needs to have a certain degree of light transmission.

Q3. What parameters can be obtained by ellipsometer testing?

A. Film thickness, wavelength - refractive index curve, wavelength - extinction coefficient curve, etc.