Auger Electron Spectroscopy Analysis

Auger electron spectroscopy (AES) uses a high-energy electron beam as a radiation source to excite atoms and lead to the emission of “Auger” electrons. The kinetic energies of the emitted Auger electrons are measured and are characteristic of elements present within the top 3-10 nm of the sample. Since the electron beam can be focused to diameters of 10-20nm, AES is extremely suitable for investing particles and small surface features. AES is a surface-sensitive tool for material surface analysis and is widely used in research on catalysis, adsorption, corrosion, and wear.

STEMart conducts auger electron spectroscopy analysis to obtain information of surface composition, concentration and chemical state.

Test Capabilities

• Material defect and failure analysis
  • Identification of defects in electronic devices to investigate failure causes
  • Identification of grain boundary contamination in metal fractures, fatigues and failures
  • Cross-sectional analysis of buried defects in film stacks
• Particle analysis
  • Analysis of sub-µm particles for determination of contamination sources
• Surface analysis
  • Identification of solid surface adsorption, cleanliness, contamination, etc.
  • Analysis of material surface segregation, surface impurity distribution
  • Study of surface chemical processes, such as corrosion, passivation, catalysis, oxidation, etc.
  • Study of surface mechanical properties, such as friction, wear, adhesion, fracture, etc.
• Small-area depth profiling
  • Small-area depth profiling of bond pads on die
• Thin film analysis composition
  • Study of the growth mechanism of thin film and multilayer film
  • Integrity and uniformity of thin film coatings such as diamond-like-carbon (DLC)
  • Determination of the oxide layer thickness of electro-polished devices
• Metallurgical analysis
• Qualitative and semi-quantitative surface element analysis
• Analysis of chemical valence state of surface element
• Surface element distribution analysis
  • Mapping of elemental distribution on discolored or corroded regions
• Interface analysis
  • Study of the interface of metal, semiconductor and composite material

For more information about our auger electron spectroscopy analysis services, please contact us.