Scanning Electron Microscopy (SEM)

Scanning electron microscopy uses a focused beam of high-energy electrons to scan the surface of a solid specimen to obtain high-resolution images and detailed surface information of samples including external morphology (texture), chemical composition, and crystalline structure and orientation of materials making up the sample. The resolution of SEM instruments can range from < 1 nanometer up to several nanometers. The SEM is routinely used to generate high-resolution images of shapes of objects (SEI) and to show spatial variations in chemical compositions. SEM is also widely used to identify phases based on qualitative chemical analysis and/or crystalline structure.