Test Structures PA01/NM (AFM Tip Characterization Sample), MikroMasch (CAT#: STEM-M-0145-LKN)

MikroMasch Test Structures PA01 are samples for characterization of AFM tip shape with hard sharp pyramidal nanostructures. The pyramids are triangular with base length in the range 50 - 100 nm and height 50 - 150 nm. The radius of curvature of the sharpest edges is below 5 nm. The structures of the PA01 are covered by a highly wear-resistant layer.

Pyramid base:50 - 100 nm
Pyramid height: 50 - 150 nm
Smallest edge radii: < 5 nm
Active area: 5 mm x 5 mm
Chip dimensions: 5 mm x 5 mm x 0.3 mm

Test Structures TGXYZ01 (20 nm Step Height XYZ Calibration Grating), MikroMasch (CAT#: STEM-M-0146-LKN)
Test Structures TGXYZ01/NM (20 nm Step Height XYZ Calibration Grating), MikroMasch (CAT#: STEM-M-0147-LKN)