WDA-3650 Simultaneous WDXRF Spectrometer, Rigaku (CAT#: STEM-LE-1109-LC)

The WDA-3650 Simultaneous WDXRF Spectrometer for thin film evaluation has new functions and a low COO design, and has made a significant contribution to the process control of controlling the thickness of the metal film, film composition and element concentration.

Detector(s):S-PC, SC and F-PC Detector (PR gas required for F-PC)
Principle:Wavelength Dispersive X-ray Fluorescence (WDXRF)
X-Ray Tube:Rh Target, 4 kW max.
Analysis Diameter:40 to 5 mm

Simultaneously evaluate film thickness and composition
Suitable for all film types
Accepts 200mm or smaller wafers and media trays
High analysis performance, accuracy and stability
Patented "Avoid Diffraction" function enables accurate XRF results
High sensitivity boron analysis (with AD-boron channel)
The available automatic calibration function provided by the optional C-to-C autoloader was previously only found on the WaferX 300
Oil-free transformer X-ray generator
23% lower power consumption than previous models

Mini-Z Sulfur Wavelength Dispersive X-ray Fluorescence Sulfur Analyzer, Supermini200 High-Powered Benchtop Wavelength Dispersive XRF Spectrometer, ZSX 400 Wavelength Dispersive X-ray Fluorescence Spectrometer, ZSX Primus III+ WDXRF Spectrometer