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Secondary ion mass spectrometry (SIMS) is a highly sensitive surface analytical technique that is capable of detecting and mapping elements at the parts per million level with sub-micron resolution. It utilizes an energetic primary ion beam to bombard the samples and liberate secondary particles, some of which are ionized and can be captured and analysed to determine their mass/charge ratio. A wide range of elements and their isotopes can be detected by SIMS, from hydrogen to uranium.
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