BAWL-12MS Manual Focusing Wafer Inspection System, 200mm/300mm (CAT#: STEM-AL2-6360-ZJF)

The BAWL-12MS Manual Focusing Wafer Inspection System is designed for laboratory microscopy, imaging, and optical system integration. The BAWL-12MS features and optical imaging system, enabling high-definition capture of micro details on wafers. The source specifies wafer size as 200mm/300mm. The source specifies eyepiece as PL10X. The source specifies objectives as 5X/10X/20X/50X/100X. The product provides the source-described support function within a microscope or digital imaging workflow. Objective dimensions, interfaces, materials, or performance details are retained where they are explicitly stated. The accessory is intended for integration with compatible laboratory equipment.

Wafer Size: 200mm/300mm
Eyepiece: PL10X
Objectives: 5X/10X/20X/50X/100X
Focusing: Manual focusing
Illumination: 12V/10W LED

EFEM system
The EFEM system is equipped with automatic loading and unloading modules and is compatible with various wafer sizes
The advanced loadport can open and close FOUP lids, and it can also be equipped with barcode scanners and RFID reading functions
8 inch Open Cassette
12 inch FOSB
12 inch FOUP
Mapping
Using a high-precision optical detection system, wafers are scanned layer by layer to record wafer position information