AxTRAN Extremely High Vacuum Gauge, ULVAC Technologies, Inc. (CAT#: STEM-LE-1908-LC)

The AxTRAN Extremely High Vacuum Gauge is a hot cathode type ionization gauge. A Bessel box energy filter is installed between the ion source and the ion collector. This design provides a measurement resolution of 5x10E-11 Pa by reducing the residual current caused by soft X-rays and electron excited desorption (ESD) ions.

Measurement range from ultra high vacuum to extremely high vacuum.
Bessel box energy filter
Measured value output signal
Control output signal
Digital output and serial communication