XRTmicron, Rigaku (CAT#: STEM-LE-1099-LC)

Rigaku XRTmicron is a fast, high-resolution laboratory X-ray topographic system for non-destructive analysis of dislocations. Various types of dislocations and inhomogeneities in single crystal wafers (such as Si, SiC, GaN, Ge, GaAs, quartz, sapphire, rutile, calcium fluoride, etc.) can be imaged on wafers up to 300 mm in diameter.

High brightness dual wavelength X-ray source: MicroMax-007 DW
High-resolution CCD camera: XTOP (5.4 µm pixels)
Ultra high resolution CCD camera: HR-XTOP (2.4 µm pixels)
Horizontal sample holder minimizes wafer artifacts
Automatic wafer curvature correction for best dislocation image quality
Automated system operation, including X-ray anode switch, detector switch, optical switch and alignment, sample alignment and image collection
Automatic dislocation analysis
Supports 3, 4, 6, 8, and 12-inch wafers
Compatible with wafer loaders

CT Lab GX High-Speed X-ray CT scanner, CT Lab HX benchtop X-ray micro CT, nano3DX X-ray Microscope