X'Pert3 MRD XL Materials Research X-ray Diffraction System, Malvern Panalytical (CAT#: STEM-LE-0296-LC)

The X'Pert3 X'Pert3 MRD XL Materials Research X-ray Diffraction is suitable for high-resolution diffraction and scattering analysis of wafers with diameter up to 300 mm. It provides various X-ray scattering methods, including high-resolution diffraction, in-plane diffraction, reflectivity, thin-film phase analysis, wafer mapping, GISAXS, stress, texture, and non-environmental analysis. X'Pert3 MRD has the highest resolution goniometer with HEIDENHAIN encoder to realize rapid positioning, and a 5-axis bracket to support and draw wafers up to 6 inches in diameter, as well as various advanced optical elements and detecors, such as PIXcel3D for fast mutual space mapping. X'Pert3 MRD-XL also provides advanced automatic wafer loader options which load wafer from a clean room and place it on to a self-centered wafer rack, making X'Pert3 MRD XL to be used as a "wall-in" system.

Detector(s): PIXcel3D 3D Detection System, X'Celerator, Xenon Proportional Detector
X-Ray Tube: Empyrean X-ray tube, choice of anodes: Cu, Co, Cr, Mo, Ag
Sample Type: Thin films, solid objects
Goniometer Type: High resolution, with Heidenhain encoders
Analysis Diameter: Up to 300 mm

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